先驱体陶瓷薄膜热电偶的封装及性能研究

Packaging and Performance Study of Polymer Derived Ceramics Thin-Film Thermocouples

摘要:

先驱体陶瓷（Polymer Derived Ceramics， PDCs）薄膜热电偶具有制备工艺简单、高温性能稳定等优点，非常适用于给航空发动机涡轮叶片等热端部件测温，但随着先进发动机工作温度的不断提升，其耐温上限亟待进一步提高。本文开发了一款先驱体陶瓷封装的PDCs： ITO/In₂O₃薄膜热电偶，其封装层以SiCN为先驱体溶液、纳米Al₂O₃粉末为填充材料，采用丝网印刷工艺制备。高温测试结果表明：所制备的传感器能够在短期内于1 500 ℃环境下正常工作，并在1 400 ℃内有稳定的信号输出；在1 100 ℃下进行标定测试，其线性度优于0.999，多次循环误差小于1%。

Abstract:

Polymer Derived Ceramics (PDCs) thin-film thermocouples have the advantages of a simple preparation process and a stable high-temperature performance. They are very suitable for temperature measurement of hot-end components such as aircraft engine turbine blades. However, as the operating temperature of advanced engines increases, the upper limit of their temperature resistance needs to be improved. This article develops a precursor ceramic encapsulated PDCs: ITO/In₂O₃ thin film thermocouple. The encapsulation layer uses SiCN as the precursor solution and nano-Al₂O₃ powder as the filling material, and is prepared by the screen printing process. High-temperature test results show that the prepared sensor can survive at 1 500 °C in the short term and have stable output within 1 400 °C. The calibration test at 1 100 °C shows a linearity better than 0.999, with a multiple-cycle error of less than 1%.