压阻式大扭矩动态六轴力传感器设计

Design of piezoresistive high-torque dynamic six-axis force sensor

摘要:

六轴力传感器在智能制造、精密装配、运动医疗等领域有着重要应用价值。本研究以大量程六轴力传感器为研究目标，针对六轴力解耦测量和交叉干扰抑制的技术难题，提出了一种压阻式大扭矩动态六轴力传感器的设计方法。在传感器结构设计中，采用4个直梁式三轴力传感器组合的方式进行载荷分摊，满足大力值和大扭矩的测量需求；在三轴力传感器设计中，利用弹性体应力对称性分布的特点和惠斯通电桥平衡原理，布置传感器敏感电阻并组合成测量电桥，实现三轴力的解耦测量；根据六轴力传感器在三轴力和三轴力矩作用下的应力变化规律，采用矩阵解耦的方式实现六轴力解耦测量。

Abstract:

Six-axis force sensor has important application value in intelligent manufacturing, precision assembly, sports medicine and other fields. Aiming at the technical problems of decoupling measurement and cross interference suppression of six-axis force sensor, this study puts forward a design method of piezoresistive high-torque dynamic six-axis force sensor. In sensor structure design, four straight beam three-dimensional force sensors are combined to share the load, so as to meet the requirements of high load. In three-dimensional force sensor design, the symmetry of elastomer stress distribution and the principle of Wheatstone bridge balance were used, and the sensitive resistors were organized into measuring circuit for three-dimensional force decoupling measurement. According to the stress variation law of the combined sensor under six-axis forces and torques, the six-axis forces and torques are measured by matrix decoupling.