谐振式加速度计自激振荡电路性能评价方法的研究

Research on performance evaluation method of self excited oscillation circuit of resonant accelerometer

摘要:

针对谐振式加速度计成品率不高、精度低等问题，以石英振梁加速度计为例，采用引进标准信号，将谐振电路作为“黑盒子”，对其开展独立的评价。通过评价电路的驱动电压幅值稳定性、移相稳定性、全温幅值/相位对称性等指标，与加速度计实际指标建立了一一对应的关系，为加速度计研制与性能提升提供了有效依据。实际运用表明，电路噪声性能、温度性能大幅提升，产品成品率从70%提高到了约90%。

Abstract:

Aiming at the problems of low yield and low precision of resonant accelerometer, this paper takes quartz vibrating beam accelerometer as an example, adopts the introduction of standard signal, takes the resonant circuit as "black box", and carries out independent evaluation on it. By evaluating the driving voltage amplitude stability, phase shift stability, full temperature amplitude/phase symmetry and other indicators of the circuit, a one-to-one correspondence relationship is established with the actual indicators of the accelerometer, which provides an effective basis for the development and performance improvement of the accelerometer. Through practical application, the noise performance and temperature performance of the circuit are greatly improved, and the product yield has been increased from 70% to 90%.