高温声表面波器件Pt电极的制备研究*

Study on platinum etching in SAW devices for high temperature application

摘要:

针对高温声表面波(SAW)器件中的 Pt 电极制备需求，采用电感耦合等离子体干法刻蚀工艺实现 Pt 电极的干法刻蚀。通过采用纯 Ar 气源，研究不同 ICP 功率/RF 功率下 Pt 电极的刻蚀，采用优化的刻蚀参数实现 SAW 中 Pt 叉指电极的制备。针对 Pt 溅射刻蚀中出现的再沉积问题，分析沉积物对电极制备的影响，通过后处理实现沉积物的去除，实现高温 SAW 器件的制备。

Abstract:

Dry etching of platinum electrodes is carried out by inductively coupled plasma (ICP) methods as required in Surface Acoustic Wave (SAW) devices for high temperature applications. Only with argon gas, platinum etching characteristics with different ICP power/RF power are investigated, the platinum electrodes in SAW devices are obtained by optimized etching conditions. Moreover, redeposition and its influences on the electrodes fabrication are revealed, which results from sputtering effect in platinum etching, and post processing is employed to remove it in the final fabrication of SAW devices.